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Metrology development of diamond like carbon (DLC) thin film coating on magnetic heads for high-volume manufacturing |
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| รหัสดีโอไอ | |
| Title | Metrology development of diamond like carbon (DLC) thin film coating on magnetic heads for high-volume manufacturing |
| Creator | Chirawat Srisang |
| Contributor | Pichet Limsuwan |
| Publisher | King Mongkut’s University of Technology Thonburi |
| Publication Year | 2555 |
| Keyword | Amorphous silicon (DLC), Diamond-like carbon, Silicon carbide (SiC) |
