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Preparation of polycrystalline silicon by aluminum diffusion into amorphous silicon as monitored by spectroscopic ellipsometry /Puenisara Limnonthakul |
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| รหัสดีโอไอ | |
| Title | Preparation of polycrystalline silicon by aluminum diffusion into amorphous silicon as monitored by spectroscopic ellipsometry / |
| Creator | Puenisara Limnonthakul |
| Publisher | King Mongkut's University of Technology Thonburi, |
| Publication Year | 2553 |
| Keyword | Polycrystalline silicon, Aluminum, Spectroscopic ellipsometry, Amorphous silicon |
