Digital Object Identifier

	10.14457/KMUTT.the.2010.16 Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method /Adisorn Buranawong
รหัสดีโอไอ	10.14457/KMUTT.the.2010.16
Title	Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method /
Creator	Adisorn Buranawong
Publisher	King Mongkut's University of Technology Thonburi,
Publication Year	2553
Keyword	Thin films, Unbalanced magnetron sputtering method, Titanium aluminium nitride

King Mongkut's University of Technology Thonburi

บรรณานุกรม

EndNote

APA

Adisorn Buranawong. (2010) Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method /. King Mongkut's University of Technology Thonburi,:ม.ป.ท. 10.14457/KMUTT.the.2010.16

Chicago

Adisorn Buranawong. 2010. Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method /. ม.ป.ท.:King Mongkut's University of Technology Thonburi,; 10.14457/KMUTT.the.2010.16

MLA

Adisorn Buranawong. Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method /. ม.ป.ท.:King Mongkut's University of Technology Thonburi, 2010. Print. 10.14457/KMUTT.the.2010.16

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