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Synthesis of diamond-like carbon thin film on alumina substrate by microwave plasma enganced chemical vapor deposition technique /Chotiwan Rattanasatien |
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รหัสดีโอไอ | |
Title | Synthesis of diamond-like carbon thin film on alumina substrate by microwave plasma enganced chemical vapor deposition technique / |
Creator | Chotiwan Rattanasatien |
Contributor | Nattaporn Tonanon, |
Publisher | Chulalongkorn University, |
Publication Year | 2553 |
Keyword | Microwave Plasma Enganced Chemical Vapor Deposition Technique, Thin films, Chemicals |