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Growth of multifunctional zirconium nitrde thin films by reactive dc magnetron sputtering /Jirawan Saenton |
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| รหัสดีโอไอ | |
| Title | Growth of multifunctional zirconium nitrde thin films by reactive dc magnetron sputtering / |
| Creator | Jirawan Saenton |
| Contributor | Sukkaneste Tungasmita, |
| Publisher | Chulalongkorn University, |
| Publication Year | 2552 |
| Keyword | Sputtering, Thin films |
