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Influence of laser beam's image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser |
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| รหัสดีโอไอ | |
| Creator | 1. Ales Babnik 2. Rok Petkovsek 3. Janez Mozina |
| Title | Influence of laser beam's image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser |
| Publisher | Maejo University |
| Publication Year | 2556 |
| Journal Title | Maejo International Journal of Science and Technology |
| Journal Vol. | 7 |
| Journal No. | 1 |
| Page no. | 48 |
| Keyword | laser processing,excimer laser,mask-projection technique,glass micro-drilling,hole geometry |
| ISSN | 1905-7873 |
| Abstract | We study the influence of a laser beam's image-plane position relative to the processed surface for the deep-hole, laser-microdrilling of soda-lime glass with an excimer 308-nm laser and mask-projection technique. It is demonstrated that the image-plane position has a significant influence on the hole's tapering and final depth. Holes with exit diameters up to 10 times smaller than the mask-image diameter are produced in the case of perforation during the appropriate process phase determined by the formation of the plasma plume. |
