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Effects of different ohmic contact widths and distances on the absolute sensitivity of two-dimensional hall sensor |
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| รหัสดีโอไอ | |
| Creator | 1. Yongyut Kaewjumras 2. Athirot Mano 3. Amporn Poyai 4. Wisut Titiroongruang |
| Title | Effects of different ohmic contact widths and distances on the absolute sensitivity of two-dimensional hall sensor |
| Publisher | Faculty of Engineering, Khon Kaen University |
| Publication Year | 2559 |
| Journal Title | KKU Engineering Journal |
| Journal Vol. | 43 |
| Journal No. | S1 |
| Page no. | 23-25 |
| Keyword | Hall effect, 2D hall, Hall structure, Width space, Sensitivity |
| ISSN | 0125-8273 |
| Abstract | This research has investigated the effect of different ohmic contact widths and spacing (distances) on the perpendicular- and parallel-directional absolute sensitivity of silicon-based two-dimensional (2D) Hall sensors. The experimental sensors were of two configurations. The first configuration was of 100?m and 40?m in width (W) and spacing (S), while the other configuration was of 300?m in W and 60?m in S. The sensors were fabricated on a 20-30W.cm-resistivity p-type silicon substrate with five etched aluminum (Al) ohmic contacts. In the experiment, the perpendicular and parallel absolute sensitivity of the sensors were tested by varying the magnetic flux density from -5000 to 5000 Gauss (G). The findings revealed that the proposed sensors were capable of magnetic sensing in both perpendicular and parallel directions. Specifically, the perpendicular absolute sensitivity of the sensor with the 300?m contact width was 2.08 times higher than that with 100?m width. Meanwhile, the parallel absolute sensitivity characteristics associated with the two different contact distances (i.e. 40?m and 60?m) were similar. Thus, the ohmic contact width plays a more crucial role in the sensitivity enhancement of the Hall sensors. |
