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Effects of aluminium doping concentration on properties of AZO filmsprepared by RF magnetron sputtering technique |
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| รหัสดีโอไอ | |
| Creator | 1. Narongchai Boonyopakorn 2. Harutai Dinsakul |
| Title | Effects of aluminium doping concentration on properties of AZO filmsprepared by RF magnetron sputtering technique |
| Publisher | Nakhon Pathom Rajabhat University |
| Publication Year | 2560 |
| Journal Title | Journal of Thai Interdisciplinary Research |
| Journal Vol. | Vol.12 |
| Journal No. | No.4 |
| Page no. | 12 |
| Keyword | Al2O3doped ZnO targets, AZO films, Al-doping concentration and RF magnetron sputtering |
| ISSN | 2465-3837 |
