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Effect of Total Pressure on the Structure of TiCrN Thin Films Prepared from Mosaic Target by Reactive DC Magnetron Sputtering |
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| รหัสดีโอไอ | |
| Title | Effect of Total Pressure on the Structure of TiCrN Thin Films Prepared from Mosaic Target by Reactive DC Magnetron Sputtering |
| Creator | Nirun Witit-anun |
| Contributor | Siriwat Alaksanasuwan, Adisorn Buranawong, Nirun Witit-anun |
| Publisher | RANGSIT UNIVERSITY |
| Publication Year | 2563 |
| Keyword | TiCrN, Thin films, Reactive magnetron sputtering, Total pressure, Mosaic target |
| ISBN | 978-616-421-104-9 |
| Language | EN |
| URL Website | https://rsucon.rsu.ac.th |
