|
Widefield Microscope for Projection Maskless Micropattern in Photolithography Applications |
|---|---|
| รหัสดีโอไอ | |
| Title | Widefield Microscope for Projection Maskless Micropattern in Photolithography Applications |
| Creator | Chayanisa Sukkasem |
| Contributor | Suejit Pechprasarn, Suvicha Sasivimolkul, Phitsini Suvarnaphaet |
| Publisher | Rangsit University |
| Publication Year | 2562 |
| Keyword | Widefield Microscopy, Projection Maskless Micropattern, Microfabrication, Optics, Instrumentation |
| ISBN | 978-616-421-080-6 |
| Language | EN |
| URL Website | https://rsucon.rsu.ac.th/ |
