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Synthesis of Al Doped ZnO Thin Films from ZnO Powder Mixed with Al Wire Targets by Using Asymmetric Bipolar Pulsed-dc Magnetron Sputtering System |
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| รหัสดีโอไอ | |
| Creator | Nuwat Phimpabutra |
| Title | Synthesis of Al Doped ZnO Thin Films from ZnO Powder Mixed with Al Wire Targets by Using Asymmetric Bipolar Pulsed-dc Magnetron Sputtering System |
| Publisher | Naresuan University Graduate School |
| Publication Year | 2565 |
| Journal Title | Naresuan University Journal: Science and Technology |
| Journal Vol. | 30 |
| Journal No. | 3 |
| Page no. | 23-30 |
| Keyword | Al doped ZnO, optical transmittance, resistivity, sputtering, ZnO films |
| URL Website | https://ph03.tci-thaijo.org/index.php/ahstr/article/view/1326 |
| Website title | Naresuan University Journal: Science and Technology |
| ISSN | 0858-7418 |
