Structural properties of mechanically ball-milled porous silicon
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Creator 1. Chanika Puridetvorakul
2. Wandee Onreabroy
3. Tula Jutarosaga
Title Structural properties of mechanically ball-milled porous silicon
Publisher Research and Development Office, Prince of Songkla University
Publication Year 2561
Journal Title Songklanakarin Journal of Science and Technology
Journal Vol. 40
Journal No. 2
Page no. 354
Keyword ball milling, hydrofluoric leaching, nanostructure materials, porous silicon
URL Website http://rdo.psu.ac.th/sjstweb/index.php
ISSN 0125-3395
Abstract A simple powder technique with hydrofluoric (HF) acid leaching technique was presented for the fabrication of bulkporous silicon (PS). Silicon wafers were crushed, ball milled for various milling times and pressed into pellets under the pressureof 4,000 psi (276 bar). Samples were annealed in H2/Ar and in air. Structural properties of PS were investigated using X-raydiffraction technique, scanning electron microscopy, and Fourier-transform infrared spectroscopy. Crystalline size of Sinanoparticles decreased with increase of milling time and can be improved after mechanical pressing and annealing. Obtained PSpellets had uniform porosity. Porosity of the specimen could be significantly increased with the combination of annealing in airto promote the oxide layer on the silicon nanoparticles and HF leaching to form voids by removing the created oxide layer.Preliminary results showed that the percent porosity can be increased up to 43.6%.
Songklanakarin Journal of Science and Technology (SJST)

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